基本素養 Basic Literacy
■ 專業倫理與人文素養
Demonstrated professional ethical and humanitarian behaviour.
■ 誠信負責與務實素養
Developed sense of professional integrity.
■ 永續環境與社會關懷
Developed sense of environmental sustainability and social responsibility.
□ 多元文化與國際視野
Developed multicultural and international perspective.
核心能力 Competence
■ 機械工程之專業知識
Developed mechanical engineering skills and knowledge.
■ 規劃與執行專題研究之能力
Ability to plan and execute research projects.
■ 專業論文與報告之撰寫和表達能力
Ability to write professional reports / papers and prepare presentations.
□ 創新思考與獨立研究之能力
Ability to perform independent research and demonstrate innovative thinking.
■ 解決問題與協調整合之能力
Ability to solve problems in a coordinated and integrated manner.
■ 前瞻宏觀的國際視野
Developed international and "forward thinking" perspective.
■ 領導、管理及組織團體之能力
Ability to organize, manage and act in a position of leadership.
■ 自我成長之能力(人文素養與服務精神、專業倫理與終身學習)
Developed sense of "self improvement" (with regard to professional ethics, social responsibility and lifelong learning).
課程概述 Course Description
概述 本課程分三部分，（一）微奈米機電系統產品與應用；（二）微機電系統技術介紹，包括基礎半導體製程、體型微加工、面型微加工、CMOS微加工、LIGA／LIGA-like 製程等技術；（三）整合技術與實例說明，包括材料課題、製程課題、並以微感測器和微致動器等實例說明。 目標 了解微機電系統技術的製程、材料與整合知識，以及在產品與應用的範疇，作為未來微奈米機電系統相關研究的一個基礎。This course can be divided into three parts: (1) Introduction to the product and application of MEMS/NEMS. (2) Microfabrication technology: Si-based and non-Si based processes. (3) Process Integration and case study.
課程學習目標 Course Objectives
課程進度 Progress Description
| 進度說明 Progress Description | |
|---|---|
| 1 | 課程介紹、微奈米機電系統簡介 |
| 2 | 微奈米機電系統產品與應用、基礎半導體製程(1) |
| 3 | 基礎半導體製程(1)：overall process and integration |
| 4 | 基礎半導體製程(2)：Oxidation, Diffusion & Implantation |
| 5 | 基礎半導體製程(3)：Lithography |
| 6 | 基礎半導體製程(4)：Thin films |
| 7 | 基礎半導體製程(5)：Etching、體型微加工 (Bulk micromachining) |
| 8 | 體型微加工 (Bulk micromachining) |
| 9 | 面型微加工 (Surface micromachining) |
| 10 | 面型微加工 (Surface micromachining) |
| 11 | 作業檢討、期中考(Mid term exam) |
| 12 | 面型微加工(Surface micromachining)、LIGA/LIGA-like製程 |
| 13 | LIGA/LIGA-like 製程 |
| 14 | LIGA/LIGA-like 製程、CMOS微加工 |
| 15 | CMOS微加工 |
| 16 | 整合技術與實例說明（1） |
| 17 | 整合技術與實例說明（2） |
| 18 | 期末報告 (Final report) |
以上每週進度教師可依上課情況做適度調整。The schedule may be subject to change.
課程是否與永續發展目標相關調查
Survey of the conntent relevant to SDGs
本課程與SDGs相關項目如下：
This course is relevant to these items of SDGs as following:
- 健康與福祉 (Good health and Well Being)
- 教育品質 (Quality Education)
- 性別平等 (Gender Equality)
有關課程其他調查 Other Surveys of Courses
1.本課程是否規劃業界教師參與教學或演講? 否Is there any industry specialist invited in this course? How many times? No
2.本課程是否規劃含校外實習(並非參訪)? 否
Are there any internships involved in the course? How many hours? No
3.本課程是否可歸認為學術倫理課程? 否
Is this course recognized as an academic ethics course? In the course how many hours are regarding academic ethics topics? No
4.本課程是否屬進入社區實踐課程? 否
Is this course recognized as a Community engagement and Service learning course? Which community will be engaged? No