基本素養 Basic Literacy

專業倫理與人文素養
Demonstrated professional ethical and humanitarian behaviour.
誠信負責與務實素養
Developed sense of professional integrity.
永續環境與社會關懷
Developed sense of environmental sustainability and social responsibility.
多元文化與國際視野
Developed multicultural and international perspective.

核心能力 Competence

機械工程之專業知識
Developed mechanical engineering skills and knowledge.
規劃與執行專題研究之能力
Ability to plan and execute research projects.
專業論文與報告之撰寫和表達能力
Ability to write professional reports / papers and prepare presentations.
創新思考與獨立研究之能力
Ability to perform independent research and demonstrate innovative thinking.
解決問題與協調整合之能力
Ability to solve problems in a coordinated and integrated manner.
前瞻宏觀的國際視野
Developed international and "forward thinking" perspective.
領導、管理及組織團體之能力
Ability to organize, manage and act in a position of leadership.
自我成長之能力(人文素養與服務精神、專業倫理與終身學習)
Developed sense of "self improvement" (with regard to professional ethics, social responsibility and lifelong learning).

課程概述 Course Description

概述 本課程分三部分,(一)微奈米機電系統產品與應用;(二)微機電系統技術介紹,包括基礎半導體製程、體型微加工、面型微加工、CMOS微加工、LIGA/LIGA-like 製程等技術;(三)整合技術與實例說明,包括材料課題、製程課題、並以微感測器和微致動器等實例說明。 目標 了解微機電系統技術的製程、材料與整合知識,以及在產品與應用的範疇,作為未來微奈米機電系統相關研究的一個基礎。
This course can be divided into three parts: (1) Introduction to the product and application of MEMS/NEMS. (2) Microfabrication technology: Si-based and non-Si based processes. (3) Process Integration and case study.

課程學習目標 Course Objectives

  • 了解微機電系統技術的製程、
  • 材料與整合知識,
  • 以及在產品與應用的範疇,作為未來微奈米機電系統相關研究的一個基礎。
  • 課程進度 Progress Description

    進度說明 Progress Description
    1課程介紹、微奈米機電系統簡介
    2微奈米機電系統產品與應用、基礎半導體製程(1)
    3基礎半導體製程(1):overall process and integration
    4基礎半導體製程(2):Oxidation, Diffusion & Implantation
    5基礎半導體製程(3):Lithography
    6基礎半導體製程(4):Thin films
    7基礎半導體製程(5):Etching、體型微加工 (Bulk micromachining)
    8體型微加工 (Bulk micromachining)
    9面型微加工 (Surface micromachining)
    10面型微加工 (Surface micromachining)
    11作業檢討、期中考(Mid term exam)
    12面型微加工(Surface micromachining)、LIGA/LIGA-like製程
    13LIGA/LIGA-like 製程
    14LIGA/LIGA-like 製程、CMOS微加工
    15CMOS微加工
    16整合技術與實例說明(1)
    17整合技術與實例說明(2)
    18期末報告 (Final report)
     以上每週進度教師可依上課情況做適度調整。The schedule may be subject to change.

    課程是否與永續發展目標相關調查
    Survey of the conntent relevant to SDGs

    本課程與SDGs相關項目如下:
    This course is relevant to these items of SDGs as following:
    • 健康與福祉 (Good health and Well Being)
    • 教育品質 (Quality Education)
    • 性別平等 (Gender Equality)

    有關課程其他調查 Other Surveys of Courses

    1.本課程是否規劃業界教師參與教學或演講? 否
    Is there any industry specialist invited in this course? How many times? No
    2.本課程是否規劃含校外實習(並非參訪)? 否
    Are there any internships involved in the course? How many hours? No
    3.本課程是否可歸認為學術倫理課程? 否
    Is this course recognized as an academic ethics course? In the course how many hours are regarding academic ethics topics? No
    4.本課程是否屬進入社區實踐課程? 否
    Is this course recognized as a Community engagement and Service learning course? Which community will be engaged? No