基本素養 Basic Literacy
□ 人文與倫理素養
Quality of humanism and ethics.
□ 誠信素養
Integrity.
□ 社會關懷
Care for society.
核心能力 Competence
■ 工程領域之專業知識
Professional knowledge in engineering field.
■ 策劃及執行專題研究之能力
Plan and execute case study.
■ 撰寫專業論文之能力
Write professional essays.
■ 創新思考及獨立解決問題之能力
Creative thinking and independent problem-solving ability.
□ 與不同領域人員協調整合之能力
Integration and negotiation with other fields’ experts.
□ 廣闊之國際視野
Wide global vision.
□ 領導、管理及規劃的能力
Leadership, management, arrangement ability.
■ 終身自我學習成長之能力
Lifelong self-learning ability.
□ 國際視野
Global vision.
課程概述 Course Description
本課程將介紹真空基本理論、真空幫浦的工作原理、真空系統的設計及各種半導體製程設備原理和應用。This course will introduce the basic theory of vacuum, the working principle of vacuum pumps, the design of vacuum systems, and the principles and applications of various semiconductor process equipment.
課程學習目標 Course Objectives
課程進度 Progress Description
| 進度說明 Progress Description | |
|---|---|
| 1 | 真空的基本觀念 |
| 2 | 氣體動力論 |
| 3 | 真空幫浦 |
| 4 | 真空幫浦 |
| 5 | 真空幫浦 |
| 6 | 真空材料與零件 |
| 7 | 真空材料與零件 |
| 8 | 真空測漏 |
| 9 | 期中考 |
| 10 | 真空技術的應用 |
| 11 | 真空鍍膜系統 |
| 12 | 真空鍍膜系統 |
| 13 | 真空鍍膜系統 |
| 14 | 表面分析儀 |
| 15 | 表面分析儀 |
| 16 | 表面分析儀 |
| 17 | 台灣產業普遍真空處理系統 |
| 18 | 期末考 |
以上每週進度教師可依上課情況做適度調整。The schedule may be subject to change.
有關課程其他調查 Other Surveys of Courses
1.本課程是否規劃業界教師參與教學或演講? 否Is there any industry specialist invited in this course? How many times? No
2.本課程是否規劃含校外實習(並非參訪)? 否
Are there any internships involved in the course? How many hours? No
3.本課程是否可歸認為學術倫理課程? 否
Is this course recognized as an academic ethics course? In the course how many hours are regarding academic ethics topics? No
4.本課程是否屬進入社區實踐課程? 否
Is this course recognized as a Community engagement and Service learning course? Which community will be engaged? No