基本素養 Basic Literacy

核心能力 Competence

具電機工程相關領域之專業知識。
To possess professional knowledge in the field of electrical engineering.
策劃及執行專題研究之能力。
The ability to plan and carry out a research project.
撰寫專業論文之能力。
To write a professional-quality dissertation.
創新思考及獨立解決問題之能力。
Innovative thinking and the ability to solve problems independently.
跨領域人員協調整合之能力。
Multidisciplinary coordination and integration capabilities.
好的國際觀以及理解專業倫理與社會責任之能力。
A solid international outlook and the ability to understand professional ethics and social responsibility.
領導、管理及規劃之能力。
Leadership, management and planning abilities.
終身自我學習成長之能力
The ability to learn and develop throughout life.

課程概述 Course Description

本課程將介紹微機電元件之基本理論並及引導學生進行微機電元件之實作,涵蓋範圍包括微機電常用製程、元件設計與模擬、光罩layout、與各是微機電元件之基本工作原理的介紹。教學方法主要分為四部分: (一)基礎力學介紹。(二)微機電製程介紹。(三)微機電元件模擬與設計。(四)實作規劃與問題討論。
DESIGN,MODELING,AND FABRICATION OF MEMS DEVICES

課程學習目標 Course Objectives

  • 具電機工程相關領域之專業知識
  • 撰寫專業論文之能力
  • 創新思考及獨立解決問題之能力
  • 課程進度 Progress Description

    進度說明 Progress Description
    1Introduction
    2Introduction
    3Introduction of Microfabrication
    4Review of Electrical and Mechanical Concepts
    5Review of Electrical and Mechanical Concepts
    6Electrostatic Sensing and Actuation
    7Review Ch1-4, 1st Midterm
    8Piezoresistive Sensors
    9Piezoelectric Sensing and Actuation
    10Piezoelectric Sensing and Actuation
    11Magnetic Actuation
    12Review Ch6-8, 2nd Midterm
    13Bulk Micromachining and Silicon Anisotropic Etching
    14Surface Micromachining
    15Optical MEMS
    16Final Presentation
    17Review of All Materials
    18Final Exam
     以上每週進度教師可依上課情況做適度調整。The schedule may be subject to change.

    有關課程其他調查 Other Surveys of Courses

    1.本課程是否規劃業界教師參與教學或演講?
    Is there any industry specialist invited in this course? How many times?
    2.本課程是否規劃含校外實習(並非參訪)?
    Are there any internships involved in the course? How many hours?
    3.本課程是否可歸認為學術倫理課程?
    Is this course recognized as an academic ethics course? In the course how many hours are regarding academic ethics topics?
    4.本課程是否屬進入社區實踐課程?
    Is this course recognized as a Community engagement and Service learning course? Which community will be engaged?