1. 2.
3.
微製造概論
FUNDAMENTALS OF MICROFABRICATION

微製造概論
The objectives of this course are to provide an overview of MEMS/BioMEMS and understanding of the basic silicon based microfabrication techniques. Mold making and polymer micro/nanofabrication techniques will also be discussed. In addition, basic concept and applications of microfluidics will be introduced as well. The course contents are: 1. Introduction to MEMS/BioMEMS 2. Lithography 3. Materials for MEMS/BioMEMS 4. Wet Bulk Micromachining 5. Pattern Transfer (Dry Etching and Additive Techniques) 6. Surface Micromachining 7. LIGA 8. Mold Making and Polymer Micro/nanofabrication 9. Applications of Micro Devices 10. Introduction to Microfluidics

課程教育目標
B 訓練學生實作、溝通、解決問題及創新研究之能力。 Provide training to students on practice, communication, problem solving, and R&D skills.
C 加強學生團隊合作和知識整合的能力。 Reinforce students’ ability on teamwork and knowledge integration.
D 教育學生認識工程倫理和社會責任,並拓展國際視野。 Educate students to understand engineering ethics and societal responsibility, and expand their international vision.
課程基本素養與核心能力
E 具備口頭與撰寫報告、有效溝通、領域整合及團隊合作的能力。(能力五)
G 理解及應用專業倫理,認知社會責任及尊重多元觀點 (能力七)
H 認識時勢變遷,瞭解工程技術對環境、社會及全球的影響,並培養終身學習成長的習慣。(能力八)
近年開課資訊
開課年度 課程碼 分班碼 課程名稱
(超連結為課程大綱)
學分數 英語授課 授課教師
0103/2 E344000 微製造概論 3.0 N 莊怡哲
0101/2 E344000 微製造概論 3.0 N 莊怡哲
0100/2 E344000 微製造概論 3.0 N 莊怡哲
0099/2 E344000 微製造概論 3.0 N 莊怡哲
0098/2 E344000 微製造概論 3.0 N 莊怡哲